Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle beam writing method and charged particle beam writing apparatus

Charged particle beam writing method and charged particle beam writing apparatus

US Patent 12249483 · Granted Mar 11, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multiple charged particle beam writing apparatus, multiple charged particle beam2025
Charged particle beam writing method, charged particle beam writing apparatus, a2025
Charged particle beam writing apparatus, charged particle beam writing method, a2024
Charged particle beam writing method, charged particle beam writing apparatus, a2023
Charged-particle beam writing apparatus and charged-particle beam writing method2020
Method for acquiring parameter for dose correction of charged particle beam, cha2019
Charged particle beam writing method and charged particle beam writing apparatus2019
Method for acquiring parameter for dose correction of charged particle beam, cha2018
Charged particle beam writing apparatus and charged particle beam writing method2017
Electron beam writing apparatus, and method for adjusting convergence half angle2016