Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Support unit, substrate treating apparatus including the same and temperature control method

Support unit, substrate treating apparatus including the same and temperature control method

US Patent 12207362 · Granted Jan 21, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for wafer placement teaching and method for wafer placement teaching u2025
Control program, container and semiconductor device manufacturing system for cha2025
Control program, container and semiconductor device manufacturing system for cha2025
Front combination lamp for a motor vehicle2025
Rear combination lamp for a motor vehicle2025
Light emitting diode package2025
Non-invasive type electrocardiogram monitoring device and method2025
Apparatus and method for measuring the gap2025
Apparatus and method for measuring the gap2025
Apparatus and method for measuring the gap2025
Apparatus and method for measuring the gap2025
Support unit, heating unit and substrate treating apparatus including the same2025