Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313392 | Apparatus and method for measuring the gap | Chung Woo Lee, In Kyu Park, Yong-seok JANG | 2025-05-27 |
| 12207362 | Support unit, substrate treating apparatus including the same and temperature control method | Chung Woo Lee, In Kyu Park, Yong-seok JANG | 2025-01-21 |
| 11543838 | Air pressure control device | Chung Woo Lee, In Kyu Park, Yong-seok JANG | 2023-01-03 |