Substrate container with enhanced flow field therein

Assignee

• Gudeng Precision Industrial Co.

Inventors

• Ming-Chien Chiu (89 patents)
• EN-NIEN SHEN (6 patents)
• Yung-Chin Pan (28 patents)
• Chih-Ming Lin (72 patents)
• Wei Liu (31 patents)
• Cheng-En Chung (14 patents)
• PO-TING LEE (12 patents)
• Jyun-Yan Jiang (2 patents)

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