Organometallic radiation patternable coatings with low defectivity and corresponding methods

Assignee

• Inpria

Inventors

• Benjamin L. Clark (19 patents)
• Gaetano Giordano (1 patents)
• Shu-Hao Chang (48 patents)
• Dominick Smiddy (7 patents)
• Mark Geniza (4 patents)
• Craig M. Gates (8 patents)
• Jan Doise (5 patents)
• Peter De Schepper (10 patents)

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