Coating composition for photoresist underlayer

Assignee

• Rohm And Haas Electronic Materials Korea

Inventors

• Jin Hong Park (61 patents)
• Yoo-Jin Ghang (2 patents)
• Suwoong Kim (4 patents)
• You Rim Shin (4 patents)
• Jung-June Lee (19 patents)
• Jae Hwan Sim (15 patents)

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