Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer boat handling device, vertical batch furnace and method

Wafer boat handling device, vertical batch furnace and method

US Patent 11996309 · Granted May 28, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Injector configured for arrangement within a reactor of a vertical furnace and v2025
Substrate processing apparatus, reactor mover for moving a reactor of the appara2025
Vertical batch furnace assembly comprising a cooling gas supply2024
Vertical batch furnace assembly with detector to detect cassette2024
Vertical batch furnace assembly comprising a cooling gas supply2022
Wafer boat handling device, vertical batch furnace and method2022