Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cyclical deposition methods

Cyclical deposition methods

US Patent 11970769 · Granted Apr 30, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reactor system comprising a tuning circuit2025
Method of forming a structure and system for same2025
Method and system for forming patterned structures using multiple patterning pro2024
Method for depositing silicon oxide film having improved quality by PEALD using 2024
Method for forming barrier layer and method for manufacturing semiconductor devi2023
Method for depositing silicon oxide film having improved quality by peald using 2022
Substrate processing method and apparatus2022
Methods for forming doped silicon oxide thin films2022
Methods for forming doped silicon oxide thin films2020
Methods for forming doped silicon oxide thin films2019
Methods for forming doped silicon oxide thin films2018
Method for protecting layer by forming hydrocarbon-based extremely thin film2018