Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate treating apparatus, ion implantation apparatus, and ion implantation method

Substrate treating apparatus, ion implantation apparatus, and ion implantation method

US Patent 11961695 · Granted Apr 16, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for treating substrate2025
Apparatus for correcting photomask and method thereof2025
Moving assembly for recovery guard and substrate processing apparatus2025
Support unit and substrate treating apparatus2025
Support unit and substrate treating apparatus2025
Transport vehicle management method2025
Lithium secondary battery2024
Substrate processing apparatus and substrate processing method2024
Method and apparatus for treating substrate2024
Method and apparatus for treating substrate2024
Home port and substrate processing apparatus using same2024
Heterogeneous composite material and method for producing the same2024