Process environment for inorganic resist patterning

Assignee

• Inpria

Inventors

• Alan J. Telecky (27 patents)
• Jason K. Stowers (19 patents)
• Douglas A. Keszler (57 patents)
• Stephen T. Meyers (35 patents)
• Peter De Schepper (10 patents)
• Sonia Castellanos Ortega (3 patents)
• Michael Greer (4 patents)
• Kirsten Louthan (2 patents)

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