Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods of forming molybdenum contacts

Methods of forming molybdenum contacts

US Patent 11869806 · Granted Jan 9, 2024

Estimated economic value: $49,156,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Snow sublimation meter2025
Conformal molybdenum deposition2025
Conformal molybdenum deposition2025
Method of tuning film properties of metal nitride using plasma2025
Low resistivity metal contact stack2025
Low resistivity metal contact stack2025
Methods and apparatus for seam reduction or elimination2025
Methods and apparatus for seam reduction or elimination2025
Methods and apparatus for seam reduction or elimination2025
Methods and materials for enhanced barrier performance and reduced via resistanc2025
Seamless gapfill of metal nitrides2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL2025