Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck and substrate fixing device

Electrostatic chuck and substrate fixing device

US Patent 11862501 · Granted Jan 2, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Magnetic disk apparatus and method2025
Tray and substrate fixing device2025
Tray and substrate fixing device2025
Magnetic disk apparatus and method2024
Magnetic disk device2024
Magnetic disk device stored trace data of the read/write processing2023
Electrostatic chuck and semiconductor/liquid crystal manufacturing equipment2021
Magnetic disk device and memory management method of magnetic disk device2021
Wafer holding apparatus and baseplate structure2020
Magnetic disk device having multiple independent moving actuators2020
Substrate fixture and substrate fixing device2020
Electrostatic chuck device2019