Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate pattern filling composition and use of the same

Substrate pattern filling composition and use of the same

US Patent 11859152 · Granted Jan 2, 2024

Estimated economic value: $178,546,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor aqueous composition and use of the same2024
Substrate cleaning solution, and using the same, method for manufacturing cleane2024
Substrate cleaning solution, and using the same, method for manufacturing cleane2024
Substrate processing method2024
Gap filling composition and pattern forming method using composition containing 2022
Substrate processing method and substrate processing apparatus2022
Substrate processing method and substrate processing apparatus2021
Gap filling composition and pattern forming method using low molecular weight co2021
Lithography composition, a method for forming resist patterns and a method for m2021
Substrate processing method and substrate processing apparatus2020
Reverse pattern formation composition, reverse pattern formation method, and dev2020
Inorganic polysilazane resin2019