Electrostatic actuator and physical quantity sensor

Assignee

• Denso

Inventors

• Shota HARADA (8 patents)
• Keitaro ITO (9 patents)
• Tomoya Jomori (12 patents)
• Hideo Yamada (58 patents)
• Yuuki Inagaki (10 patents)
• Teruhisa Akashi (36 patents)
• Yoshiyuki Hata (22 patents)

View full patent text on Google Patents →