Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck having a gas flow feature, and related methods

Electrostatic chuck having a gas flow feature, and related methods

US Patent 11837492 · Granted Dec 5, 2023

Estimated economic value: $151,023,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electrostatic chuck that includes upper ceramic layer that includes a dielectric2025
Electrostatic chuck that includes upper ceramic layer that includes a dielectric2025
Electrostatic chuck that includes upper ceramic layer that includes a dielectric2025
Electrostatic chuck with a charge dissipation structure2025
Electrostatic chuck with a charge dissipation structure2025
Electrostatic chuck with a charge dissipation structure2025
Preparation method for silk fibroin nerve graft fused with NT32025
Electrostatic chuck prepared by additive manufacturing, and related methods and 2025
Electrostatic chuck prepared by additive manufacturing, and related methods and 2025
Screwless semiconductor processing chambers2024
Electrostatic chuck sidewall gas curtain2024
Conductive polymeric layers for charge dissipation2024