Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of mode coupling detection and damping and usage for electrostatic MEMS mirrors

Method of mode coupling detection and damping and usage for electrostatic MEMS mirrors

US Patent 11835710 · Granted Dec 5, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and device for preparing a tensile test2025
Method for determining a torsion angle of a mirror body of an MEMS apparatus2025
Detection, correction, and compensation of coupling effects of microelectromecha2025
Detection, correction, and compensation of coupling effects of microelectromecha2025
Gain and offset diagnosis of analog-to-digital converters in sensor signal path2025
Driving signal parameter variation for driving MEMS mirrors for synchronization 2025
Driving signal parameter variation for driving MEMS mirrors for synchronization 2025
Driving signal parameter variation for driving MEMS mirrors for synchronization 2025
Driving signal parameter variation for driving MEMS mirrors for synchronization 2025
Driving signal parameter variation for driving MEMS mirrors for synchronization 2025
Method of synchronizing a fixed frequency ratio for a multi-axis scanner2024
Method and control unit for demodulation2024