Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Imprint apparatus, method of imprinting, and method of manufacturing article

Imprint apparatus, method of imprinting, and method of manufacturing article

US Patent 11833737 · Granted Dec 5, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Imprint apparatus, imprint method, and method of manufacturing article2023
Imprint method, imprint apparatus, and article manufacturing method using the sa2021
Detection device, imprint apparatus, planarization device, detection method, and2020
Imprint apparatus and article manufacturing method2020
Imprint method, imprint apparatus, and article manufacturing method2017
Imprint apparatus, and method of manufacturing article2016
Exposure method, exposure apparatus, and method of manufacturing device2014
Apparatus and method of processing substrate containing mark and method of manuf2014
Exposure method, exposure apparatus, and method of manufacturing device2013
Position detector, position detection method, exposure apparatus, and device man2013
Exposure apparatus and device manufacturing method2010
Position detecting method and apparatus2010