Assignee
Inventors
- Xubin Chen (7 patents)
- Knut Bjarne Gandrud (4 patents)
- Maarten Mees (6 patents)
- Philippe M. Vereecken (44 patents)
- AKIHIKO SAGARA (6 patents)
- Hiroki Yabe (39 patents)
- Hidekazu Arase (34 patents)
US Patent 11777143 · Granted Oct 3, 2023