System and method for ring frame cleaning and inspection

Assignee

• TSMC

Inventors

• Chien-Fa Lee (22 patents)
• Hsu-Shui Liu (76 patents)
• Jiun-Rong Pai (112 patents)
• Shou-Wen Kuo (46 patents)
• Jian-Hung Cheng (2 patents)
• M. C. Lin (3 patents)
• C.C. Chien (2 patents)
• Hsuan Lee (27 patents)
• Boris Huang (3 patents)

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