EUV photo masks and manufacturing method thereof

Assignee

• TSMC

Inventors

• Pei-Cheng Hsu (79 patents)
• Ching-Huang Chen (15 patents)
• Hung-Yi Tsai (12 patents)
• Ming-Wei Chen (38 patents)
• Ta-Cheng Lien (76 patents)
• Hsin-Chang Lee (159 patents)

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