Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Rotation driving mechanism and rotation driving method, and substrate processing apparatus and substrate processing method using same

Rotation driving mechanism and rotation driving method, and substrate processing apparatus and substrate processing method using same

US Patent 11702747 · Granted Jul 18, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing apparatus and substrate processing method2025
Apparatus for performing film forming process on substrate, and method of exhaus2025
Film deposition apparatus and film deposition method2025
Substrate processing apparatus and substrate processing method2025
Apparatus for performing film forming process on substrate and method of using v2025
Substrate processing apparatus2024
Deposition apparatus2024
Substrate processing apparatus2023
Film-forming apparatus and film-forming method2022
Substrate processing apparatus2022
Film forming method2020
Substrate processing apparatus2020