Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Conveyance apparatus, lithography apparatus, and article manufacturing method

Conveyance apparatus, lithography apparatus, and article manufacturing method

US Patent 11698584 · Granted Jul 11, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate transportation hand, substrate transportation system, storage medium, 2025
Substrate conveyance method, substrate conveyance apparatus, molding method, and2025
Substrate processing apparatus, substrate processing method, and article manufac2025
Layer forming system including cover with support pads, a positioning system wit2025
Imprint apparatus, imprint method, and article manufacturing method2021
Conveyance apparatus, conveyance method, lithography apparatus, lithography syst2021
Substrate holding apparatus and substrate processing apparatus2020
Driving apparatus and exposure apparatus and device fabrication method2015
Exposure apparatus, and method of manufacturing device using same2013
Driving apparatus and exposure apparatus, and device fabrication method2011