Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Hybrid material post-CMP brushes and methods for forming the same

Hybrid material post-CMP brushes and methods for forming the same

US Patent 11684144 · Granted Jun 27, 2023

Estimated economic value: $37,616,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and apparatuses for chemical delivery for brush conditioning2024
Methods and apparatuses for chemical delivery for brush conditioning2024
Methods and apparatuses for chemical delivery for brush conditioning2024
Brush with non-constant nodule density2023
Brush with non-constant nodule density2023
Brush with non-constant nodule density2023
Methods and apparatuses for effluent monitoring for brush conditioning2021
Methods and apparatuses for effluent monitoring for brush conditioning2021
Methods and apparatuses for effluent monitoring for brush conditioning2021
Methods and apparatuses for effluent monitoring for brush conditioning2019
Methods and apparatuses for effluent monitoring for brush conditioning2019
Methods and apparatuses for effluent monitoring for brush conditioning2019