Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Air spacer and method of forming same

Air spacer and method of forming same

US Patent 11652155 · Granted May 16, 2023

Estimated economic value: $10,371,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods of forming semiconductor devices2025
Method of manufacturing a semiconductor device and a semiconductor device2025
Air spacers around contact plugs and method forming same2025
Air spacers around contact plugs and method forming same2025
Air spacers around contact plugs and method forming same2025
Method and device for cleaning substrates2025
Lithography mask and methods2025
Photomask including fiducial mark and method of making a photomask2025
Method of manufacturing photo masks2025
EUV mask blank and method of making EUV mask blank2025
Semiconductor device structure and methods of forming the same2025
Semiconductor device structure and methods of forming the same2025