Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Enabling scanning electron microscope imaging while preventing sample damage on sensitive layers used in semiconductor manufacturing processes

Enabling scanning electron microscope imaging while preventing sample damage on sensitive layers used in semiconductor manufacturing processes

US Patent 11631602 · Granted Apr 18, 2023

Estimated economic value: $120,785,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Using absolute Z-height values for synergy between tools2023
Inspection-guided critical site selection for critical dimension measurement2021
Using deep learning based defect detection and classification schemes for pixel 2020
Overlay measurements of overlapping target structures based on symmetry of scann2019