Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus and calculation method

Plasma processing apparatus and calculation method

US Patent 11621177 · Granted Apr 4, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma processing apparatus, calculation method, and calculation program2025
Plasma processing apparatus, thermal resistance acquisition method, and thermal 2025
Substrate holding method and substrate processing apparatus2025
Method of reducing leakage of heat transfer gas and plasma processing apparatus2024
Plasma processing apparatus, temperature control method, and temperature control2024
Plasma processing apparatus, and temperature control method2024
Plasma processing apparatus2024
Plasma processing apparatus, plasma state detection method, and plasma state det2024
Plasma processing apparatus, calculation method, and calculation program2024
Cleaning method and plasma processing apparatus2023
Plasma processing apparatus, temperature control method, and temperature control2023
Plasma processing apparatus and temperature control method2023