Manufacturing of foreign oxide or foreign nitride on semiconductor

Assignee

• Turun Yliopisto

Inventors

• Mikhail Kuzmin (5 patents)
• Pekka Laukkanen (13 patents)
• Yasir Muhammad (4 patents)
• Marjukka Tuominen (7 patents)
• Johnny Dahl (8 patents)
• Veikko Tuominen (5 patents)
• Jaakko Mäkelä (6 patents)
• Marko Punkkinen (7 patents)
• Kalevi Kokko (4 patents)

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