Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923236 | Silicon-on-insulator with crystalline silicon oxide | Pekka Laukkanen, Mikhail Kuzmin, Jaakko Mäkelä, Marko Punkkinen, Antti Lahti +2 more | 2024-03-05 |
| 11646193 | Manufacturing of foreign oxide or foreign nitride on semiconductor | Mikhail Kuzmin, Pekka Laukkanen, Yasir Muhammad, Johnny Dahl, Veikko Tuominen +3 more | 2023-05-09 |
| 11615952 | Manufacturing of foreign oxide or foreign nitride on semiconductor | Mikhail Kuzmin, Pekka Laukkanen, Yasir Muhammad, Johnny Dahl, Veikko Tuominen +3 more | 2023-03-28 |
| 11443977 | Silicon-on-insulator with crystalline silicon oxide | Pekka Laukkanen, Mikhail Kuzmin, Jaakko Mäkelä, Marko Punkkinen, Antti Lahti +2 more | 2022-09-13 |
| 10256290 | Method for oxidizing a substrate surface using oxygen | Pekka Laukkanen, Jouko Lang, Marko Punkkinen, Veikko Tuominen, Johnny Dahl +1 more | 2019-04-09 |
| 9837486 | Method for oxidizing a substrate surface using oxygen | Pekka Laukkanen, Jouko Lang, Marko Punkkinen, Veikko Tuominen, Johnny Dahl +1 more | 2017-12-05 |
| 9269763 | Method for treating a substrate and a substrate | Pekka Laukkanen, Jouko Lang, Marko Punkkinen, Veikko Tuominen, Johnny Dahl +1 more | 2016-02-23 |