Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Alternating hardmasks for tight-pitch line formation

Alternating hardmasks for tight-pitch line formation

US Patent 11610780 · Granted Mar 21, 2023

Estimated economic value: $8,142,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Selective gas etching for self-aligned pattern transfer2025
Buried power rail at tight cell-to-cell space2025
Structure containing a via-to-buried power rail contact structure or a via-to-ba2025
Alternating hardmasks for tight-pitch line formation2025
Alternating hardmasks for tight-pitch line formation2025
Alternating hardmasks for tight-pitch line formation2025
Alternating hardmasks for tight-pitch line formation2025
Alternating hardmasks for tight-pitch line formation2025
Bottom contact for stacked GAA FET2025
Dielectric reflow for boundary control2025
High aspect ratio contact structure with multiple metal stacks2025
Multi-layer hardmask for defect reduction in EUV patterning2025