Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High-throughput, multi-chamber substrate processing system

High-throughput, multi-chamber substrate processing system

US Patent 11600503 · Granted Mar 7, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gas distribution assembly2025
Methods and apparatuses for flowable gap-fill2024
Multi-stage substrate processing system2024
Rotating substrate support2024
Apparatuses for thin film deposition2024
Susceptor having cooling device2024
System dedicated for parts cleaning2024
Substrate processing apparatus and method of processing substrate2023
Sheet cassette and printing system2022
Communication system and printing apparatus2022
Substrate processing apparatus and substrate processing method2022
Apparatuses for thin film deposition2022