Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Systems and methods for etching a substrate

Systems and methods for etching a substrate

US Patent 11581161 · Granted Feb 14, 2023

Estimated economic value: $75,825,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reuse of infographics2025
System and method for unbalanced current adjustment from capacity enhancement an2025
Multi-source illumination unit and method of operating the same2025
Method, apparatus, and system for dynamically controlling an electrostatic chuck2025
Battery pack and vehicle2025
Method for positioning and positioning device and access point performing the me2025
Beam manipulation of advanced charge controller module in a charged particle sys2025
Method for large-scale production of lentivirus by using GMP-level serum-free su2024
Sole2024
System for inspecting and grounding a mask in a charged particle system2024
Self-differential confocal tilt sensor for measuring level variation in charged 2024
Self-differential confocal tilt sensor for measuring level variation in charged 2024