Photoacoustic sensors and MEMS devices

Assignee

• Infineon Technologies Ag

Inventors

• Rainer Markus Schaller (50 patents)
• Jochen Dangelmaier (48 patents)
• Matthias Eberl (28 patents)
• Simon Gassner (7 patents)
• Franz Jost (47 patents)
• Stefan Kolb (65 patents)
• Horst Theuss (201 patents)

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