Single bodied platen housing a detection module for CMP systems

Assignee

• TSMC

Inventors

• Tsung-Lung Lai (8 patents)
• Cheng-Ping Chen (12 patents)
• Shih Chung Chen (51 patents)
• Sheng-Tai Peng (13 patents)
• Rong-Long Hung (2 patents)

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