Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools

Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools

US Patent 11568198 · Granted Jan 31, 2023

Estimated economic value: $29,381,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Bayesian semantic segmentation active learning with beta approximation2025
Object discovery using an autoencoder2025
System to determine collisions of an autonomous mobile device2025
Dynamic object detection using posture data2025
System for sensor fusion for autonomous mobile device2025
Unsupervised representation learning and active learning to improve data efficie2024
System for maintaining entity identifier with an autonomous mobile device2024
Deep auto-encoder for equipment health monitoring and fault detection in semicon2024
Deep auto-encoder for equipment health monitoring and fault detection in semicon2024
Deep auto-encoder for equipment health monitoring and fault detection in semicon2024
System to determine non-stationary objects in a physical space2024
System for determining user pose with an autonomous mobile device2023