Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948061 | Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools | Heng HAO, Shreekant Gayaka | 2024-04-02 |
| 11568198 | Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools | Heng HAO, Shreekant Gayaka | 2023-01-31 |
| 11031233 | High lateral to vertical ratio etch process for device manufacturing | Kyeong-Tae Lee, Sang-wook Kim, Daehee Weon, Sang-jun Choi, Jahyong Kuh | 2021-06-08 |
| 10504006 | Classification, search and retrieval of semiconductor processing metrology images using deep learning/convolutional neural networks | Shreekant Gayaka | 2019-12-10 |
| 10503144 | Anomaly detection with correlation coeffiecients | Heng HAO, James Tom Pye | 2019-12-10 |
| 10460921 | High lateral to vertical ratio etch process for device manufacturing | Kyeong-Tae Lee, Sang-wook Kim, Daehee Weon, Sang-jun Choi, Jahyong Kuh | 2019-10-29 |
| 10387755 | Classification, search and retrieval of semiconductor processing metrology images using deep learning/convolutional neural networks | Shreekant Gayaka | 2019-08-20 |
| 8529776 | High lateral to vertical ratio etch process for device manufacturing | Kyeong-Tae Lee, Sang-wook Kim, Daehee Weon, Sang-jun Choi, Jahyong Kuh | 2013-09-10 |