Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus equipped with substrate scanner

Substrate processing apparatus equipped with substrate scanner

US Patent 11551955 · Granted Jan 10, 2023

Estimated economic value: $1,182,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithography system and method of detecting fluid leakage in liquid storage tank 2025
Display substrate and method of manufacturing the same, and display device2024
Trailed multiple-viewing-angle item inspection system and method of using the sa2020
Methods and devices for detecting radioactive sources2020
Corona discharge assembly, ion mobility spectrometer and corona discharge method2019
Rotatable sample introducing device2019
Semiconductor structure2018
Method and system for detecting special nuclear materials2016
Detection method for an ion migration spectrum and an ion migration spectrometer2015
Method and system for detecting special nuclear materials2015
Photoneutron conversion target2014
Ion mobility spectrometer and method for improving the detection sensitivity the2014