Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551955 | Substrate processing apparatus equipped with substrate scanner | Ming-Che Lai, Hua Peng, Chia-He Cheng, Ming-Tso Chen, Chao-Chi Lu +3 more | 2023-01-10 |
| 7524595 | Process for forming anti-reflection coating and method for improving accuracy of overlay measurement and alignment | Wen Lin, Chung-An Chen | 2009-04-28 |