Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Stage driving apparatus, lithography apparatus, and method of manufacturing article

Stage driving apparatus, lithography apparatus, and method of manufacturing article

US Patent 11543745 · Granted Jan 3, 2023

Estimated economic value: $41,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Stage device, lithography apparatus, and article manufacturing method2025
Forming apparatus, forming method, and article manufacturing method2024
Stage apparatus, lithography apparatus, and method of manufacturing article2019
Positioning apparatus, lithography apparatus, and method of manufacturing articl2018
Motor apparatus, manufacturing method, exposure apparatus, and device fabricatio2012