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Home › Extreme ultraviolet (EUV) mask inspection system, a load-lock chamber included therein, and a method for inspecting an EUV mask using the EUV mask inspection system

Extreme ultraviolet (EUV) mask inspection system, a load-lock chamber included therein, and a method for inspecting an EUV mask using the EUV mask inspection system

US Patent 11531277 · Granted Dec 20, 2022

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