Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sealed vacuum MEMS die

Sealed vacuum MEMS die

US Patent 11528546 · Granted Dec 13, 2022

Estimated economic value: $8,913,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shielded electronic component package2024
Shielded electronic component package2023
Shielded electronic component package2021
Shielded electronic component package2019
Thin-film device2018
Shield lid interconnect package and method2016
Light-emitting device and method manufacturing the same2013
Top feature package and method2012
MEMS device with two axes comb drive actuators2011