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Home › Polishing head for face-up type polishing apparatus, polishing apparatus including the polishing head, and polishing method using the polishing apparatus

Polishing head for face-up type polishing apparatus, polishing apparatus including the polishing head, and polishing method using the polishing apparatus

US Patent 11440161 · Granted Sep 13, 2022

Estimated economic value: $6,415,000 ⓘ

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