Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Film-forming device and method for cleaning same

Film-forming device and method for cleaning same

US Patent 11390944 · Granted Jul 19, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Film forming method and film forming apparatus2024
Film forming method and film forming apparatus2024
Film forming apparatus2020
Film-forming apparatus2020
Wafer holder for manufacturing semiconductor2016
Wafer holder for manufacturing semiconductor2016
Film forming apparatus and method2012
Method of locating work in automatic exposing apparatus1991