Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate treating apparatus and substrate treating system including pin lift mechanism below cooling base and heat plate

Substrate treating apparatus and substrate treating system including pin lift mechanism below cooling base and heat plate

US Patent 11387121 · Granted Jul 12, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Automated analyzer and method of controlling automated analyzer2024
Substrate treating apparatus2022
Apparatus and method for automated analysis2021
Substrate treating method and apparatus used therefor2021
Substrate treating method2021
Substrate treating apparatus and exhaust method thereof2021
Exposure device, substrate processing apparatus, exposure method and substrate p2021
Substrate treating method2021
Substrate treating method2021
Substrate treating method and apparatus used therefor2021
Substrate treating apparatus2020
Thermal processing apparatus and thermal processing method2020