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Home › Apparatus for manufacturing group III nitride single crystal, method for manufacturing group III nitride single crystal using the apparatus, and aluminum nitride single crystal

Apparatus for manufacturing group III nitride single crystal, method for manufacturing group III nitride single crystal using the apparatus, and aluminum nitride single crystal

US Patent 11348785 · Granted May 31, 2022

Estimated economic value: $46,000 ⓘ

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