Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Dose-based end-pointing for low-kV FIB milling in TEM sample preparation

Dose-based end-pointing for low-kV FIB milling in TEM sample preparation

US Patent 11313042 · Granted Apr 26, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Artificial intelligence enabled metrology2025
Microscopy feedback for improved milling accuracy2025
Microscopy feedback for improved milling accuracy2025
Artificial intelligence-enabled preparation end-pointing2023
Method of material deposition2023
Artificial intelligence-enabled preparation end-pointing2021
Method of material deposition2021
Automated TEM sample preparation2020
Methods and apparatus for semiconductor sample workflow2020
Dose-based end-pointing for low-kV FIB milling TEM sample preparation2019
Dose-based end-pointing for low-kV FIB milling TEM sample preparation2019
Dose-based end-pointing for low-kV FIB milling TEM sample preparation2019