Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › In situ cleaning apparatus and system thereof

In situ cleaning apparatus and system thereof

US Patent 11273470 · Granted Mar 15, 2022

Estimated economic value: $18,106,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Slurry feed system and method of providing slurry to chemical mechanical planari2020
In situ cleaning apparatus and system thereof2019
In situ cleaning apparatus and system thereof2019
In situ cleaning apparatus and system thereof2019
In situ cleaning apparatus and system thereof2019
Fluid supply system, wafer processing system, and method of supplying fluid to w2018
Process for treating fluid2017
Slurry feed system and method of providing slurry to chemical mechanical planari2017
System of exhuast and operation method thereof2017
In situ clean apparatus and method thereof2017
In situ clean apparatus and method thereof2017
In situ clean apparatus and method thereof2017