Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11273470 | In situ cleaning apparatus and system thereof | Li-Hsing Chien, Rouh Jier Wang, Yu-Te Chang | 2022-03-15 |
| 10814455 | Slurry feed system and method of providing slurry to chemical mechanical planarization station | Tsung-Huang Chen, Wei Li, Chi-Tung Lai | 2020-10-27 |
| 10500616 | In situ cleaning apparatus and system thereof | Li-Hsing Chien, Rouh Jier Wang, Yu-Te Chang | 2019-12-10 |
| 10043681 | Fluid supply system, wafer processing system, and method of supplying fluid to wafer processing equipment | Ching-Jung HSU, Chun-Feng Hsu, Nan-Peng Cheng | 2018-08-07 |
| 9789448 | Process for treating fluid | Shing-Fong Wu, SHIH-PAO CHIEN, Yen-Chen Chen | 2017-10-17 |
| 9744642 | Slurry feed system and method of providing slurry to chemical mechanical planarization station | Tsung-Huang Chen, Wei Li, Chi-Tung Lai | 2017-08-29 |
| 9643217 | In situ clean apparatus and method thereof | Li-Hsing Chien, Rouh Jier Wang, Yu-Te Chang | 2017-05-09 |
| 8629356 | Magnetic field shielding raised floor panel | Chwen Yu, Kuo-An Yeh, Tzu-Sou Chuang, Chien-Teh Huang | 2014-01-14 |