Chemical mechanical planarization membrane

Assignee

• TSMC

Inventors

• Cheng-Ping Chen (12 patents)
• Ren-Dou Lee (21 patents)
• Sheng-Tai Peng (13 patents)
• Tsung-Lung Lai (8 patents)
• Tzi-Yi Shieh (6 patents)
• Chien-Wei Chang (39 patents)

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