Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Photomask, photolithography system and manufacturing process

Photomask, photolithography system and manufacturing process

US Patent 11262658 · Granted Mar 1, 2022

Estimated economic value: $10,407,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor cell and active area arrangement2025
Extreme ultraviolet (EUV) radiation source apparatus, EUV lithography system, an2025
Method of forming semiconductor device having segmented interconnect2025
Semiconductor device2025
Photomask and method for manufacturing photomask and semiconductor structure the2025
Reflection mode photomask2024
Mask defect prevention2024
Mask and method of forming the same2024
Semiconductor device2024
Pellicle having vent hole2024
Semiconductor structure and method of forming the same2024
Display apparatus2024