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Home › Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methods

Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methods

US Patent 11249394 · Granted Feb 15, 2022

Estimated economic value: $32,000 ⓘ

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